Landmark Technology Corporation

PFC gases, such as CF4, have been used mainly for the plasma etching and the cleaning of CVD equipments. However, PFC gases are left in the air for a long time, and GWP (Global Warming Potential) is nearly 10,000 times as high as that of CO2. Therefore, COP3 (Third Conference of Parties to the U.N. Framework Convention on Climate Change), held in December 1997, declared the reduction of the PFC gas emission (one of greenhouse gas) in the Kyoto Protocol and the actual line we have to achieve in 2010 have been set. LG3000 resolves PFC into elements by high-density ICP plasma, and recombines elements and the additive gases into harmless and easy-to-treat gases. LG3000 is placed after the turbo pump and abate PFC gas before adding N2 for a dry pump purge. As a result, the high efficiency of PFC gas abatement and no NOx production are seen. Now people want "green industry", and we expect LG3000 help the environment protection and realization of your companies' missions.

• Designed compactly to integrate a chamber and a power supply.
• No preliminary running. Just turning the switch "ON" while PFC gases are flowed.
• Low energy consumption. Low running cost.
• Step-by-step introduction of a LG3000 is possible.
• Quick start. Plasma is generated in 30ms.
• No negative effect on the process. Minimize the byproducts emission.

Gases Abated	CF4,C2F6,C3F8,SF6,NF3,CHF3
Process Gases	CF4,C2F6,C3F8,SF6,NF3,CHF3,H2O,O2,N2,Ar,He
Input Power	AC200V(170-255V) Single phase 18.0ATYP
Plasma Output Specification	375 to 3000W (1.8 to 2.2MHz), setting up by 375W step 1.8-2.2MHz frequency is automatically adjusted to achieve the best load much.
Operation and Display	375W step RF output setting is possible. LED displays AC input power, interlock, internal unusual temperature, plasma occurrence, under output, setting point achievement.
User Interface	15 pin D-Subminiature. Management from the system and the status signals display toward the system is possible. Refer to the interface signal table.
Vacuum Connections	NW 63 ISO flanges
Size and Weight	36cm×30cm×24cm( excluding projection) about 22kg
Environment for Use	Ambient Air Temperature	0 to 35℃ (not disturb air floating)
	Maximum Humidity	92% (provided no condensation)
	Others	No corrosion gases Not much particles
	Cooling	Water: 5 to 35℃, 2 litter/min, 675kPa (7Kg/cm2) maximum pressure Connector: 1/4 inch, NPT type

LG3000 is designed to be placed on the line between the turbo pump and the dry pump, and requires no additional space but the space above the dry pump. Therefore the low cost installation of LG3000 on the existing line is available.

By making use of features of LG3000, such as the quick start and the integrated chamber and power supply equipment, there is a possibility to apply LG3000 for the following application: